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An Electrostatic Vibrational Mems Energy Harvester of Large..:

, In: 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP),
Mitsuya, Hiroyuki ; Ashizawa, Hisayuki ; Honma, Hiroaki.. - p. 1-4 , 2019
Link: https://doi.org/10.1109/DTIP.2019.8752732