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Silicon Nitride Stress Liner Impacts on the Electrical Char..:

, In: 2019 IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC),
Cheng, Wei-Chih ; Fang, Tao ; Lei, Siqi... - p. 1-3 , 2019
Link: https://doi.org/10.1109/EDSSC.2019.8754212