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Comparing RTA and Laser SPE & LPE Annealing of Ge-epi with ..:

, In: 2019 19th International Workshop on Junction Technology (IWJT),
Borland, John ; Chaung, Shang-Shuin ; Tseng, Tseung-Yuen... - p. 1-4 , 2019
Link: https://doi.org/10.23919/IWJT.2019.8802624