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Pre-Amorphization Implants and in-situ Surface Preparation ..:

, In: 2019 19th International Workshop on Junction Technology (IWJT),
Borrel, Julien ; Gregoire, Magali ; Ghegin, Elodie... - p. 1-4 , 2019
Link: https://doi.org/10.23919/IWJT.2019.8802887