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Doping of GaN grown on silicon via ion implantation:

, In: 2019 19th International Workshop on Junction Technology (IWJT),
Mazen, Frederic ; Coig, Marianne ; Lardeau-Falcy, Aurelien... - p. 1-5 , 2019
Link: https://doi.org/10.23919/IWJT.2019.8802889