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1 Ergebnisse
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Junction technology challenges and solutions for 3D device ..:
, In:
2019 19th International Workshop on Junction Technology (IWJT)
,
Kikuchi, Yoshiaki
;
Mertens, Hans
;
Ritzenthaler, Romain
... - p. 1-5 , 2019
Link:
https://doi.org/10.23919/IWJT.2019.8802891
RT T1
2019 19th International Workshop on Junction Technology (IWJT)
: T1
Junction technology challenges and solutions for 3D device architecture
UL https://suche.suub.uni-bremen.de/peid=ieee-8802891&Exemplar=1&LAN=DE A1 Kikuchi, Yoshiaki A1 Mertens, Hans A1 Ritzenthaler, Romain A1 Chiarella, Thomas A1 Peter, Antony A1 Horiguchi, Naoto YR 2019 K1 Annealing K1 FinFETs K1 Doping K1 Ions K1 Silicon SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.23919/IWJT.2019.8802891 DO https://doi.org/10.23919/IWJT.2019.8802891 SF ELIB - SuUB Bremen
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