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1 Ergebnisse
1
Review of applications of Defect Photoluminescence Imaging ..:
, In:
2019 19th International Workshop on Junction Technology (IWJT)
,
Jastrzebski, L.
;
Roffarello
;
Nadudvari, G.
... - p. 1-6 , 2019
Link:
https://doi.org/10.23919/IWJT.2019.8802893
RT T1
2019 19th International Workshop on Junction Technology (IWJT)
: T1
Review of applications of Defect Photoluminescence Imaging (DPLI) during IC processing
UL https://suche.suub.uni-bremen.de/peid=ieee-8802893&Exemplar=1&LAN=DE A1 Jastrzebski, L. A1 Roffarello A1 Nadudvari, G. A1 Kiss, Z. A1 Lajtos, I. A1 Pongracz, A. A1 Molnar, G. A1 Nagy, M. A1 Dudas, L. A1 Basa, P. A1 Greenwood, B. A1 Duru, R. A1 Gambino, J. A1 Le-Cunff, D. A1 Cannac, M. A1 Joblot, S. A1 Mica, I. A1 Polignano, M. L. A1 Galbiati, A. A1 Monge, P. YR 2019 K1 Annealing K1 Implants K1 Silicon K1 Optimization K1 Integrated circuits K1 Diffusion tensor imaging SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.23919/IWJT.2019.8802893 DO https://doi.org/10.23919/IWJT.2019.8802893 SF ELIB - SuUB Bremen
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