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Thermal Atomic Layer Etching of Amorphous and Crystalline H..:

, In: 2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA),
Murdzek, Jessica A. ; George, Steven M. - p. 1-2 , 2019
Link: https://doi.org/10.1109/VLSI-TSA.2019.8804645