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Selective Etching of Native Silicon Oxide in Preference to ..:

, In: 2019 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA),
Ahles, Christopher ; Choi, Jong ; Hung, Raymond... - p. 1-2 , 2019
Link: https://doi.org/10.1109/VLSI-TSA.2019.8804691