I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Effects of Pre-amorphization Thickness and Carbon Implantat..:
, In:
2018 22nd International Conference on Ion Implantation Technology (IIT)
,
Lachal, Laurent
;
Nemouchi, Fabrice
;
Mazen, Frederic
... - p. 54-57 , 2018
Link:
https://doi.org/10.1109/IIT.2018.8807963
RT T1 <cTitle>2018 22nd International Conference on Ion Implantation Technology (IIT)</cTitle>: T1 <Title>Effects of Pre-amorphization Thickness and Carbon Implantation on NiPt/Si Silicidation Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8807963&Exemplar=1&LAN=DE A1 Lachal, Laurent A1 Nemouchi, Fabrice A1 Mazen, Frederic A1 Rodriguez, Philippe A1 Gregoire, Magali A1 Ghegin, Elodie A1 Milesi, Frederic A1 Coig, Marianne A1 Borrel, Julien A1 Joblot, Sylvain A1 Juhel, Marc YR 2018 K1 Silicides K1 Germanium K1 Silicon K1 Carbon K1 Thermal stability K1 Conductivity K1 Resistance K1 amorphization K1 NiPtSi K1 silicide K1 resistivity K1 roughness K1 implantation K1 thermal stability SP 54 OP 57 LK http://dx.doi.org/https://doi.org/10.1109/IIT.2018.8807963 DO https://doi.org/10.1109/IIT.2018.8807963 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
