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1
Mathematical Model of Equivalent Stress Value Dependence fr..:
, In:
2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)
,
Bortnikova, Viktoriia
;
Yevsieiev, Vladyslav
;
Maksymova, Svitlana
... - p. 83-86 , 2019
Link:
https://doi.org/10.1109/MEMSTECH.2019.8817394
RT T1 <cTitle>2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH)</cTitle>: T1 <Title>Mathematical Model of Equivalent Stress Value Dependence from Displacement of RF MEMS Membrane</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8817394&Exemplar=1&LAN=DE A1 Bortnikova, Viktoriia A1 Yevsieiev, Vladyslav A1 Maksymova, Svitlana A1 Nevliudov, Igor A1 Chala, Olena A1 Kolesnyk, Kostiantyn YR 2019 SN 2573-5373 K1 Mathematical model K1 Radio frequency K1 Stress K1 Micromechanical devices K1 Microswitches K1 Solid modeling K1 MEMS K1 membrane K1 manipulator K1 RF switch K1 3D-model K1 simulation K1 regression analysis SP 83 OP 86 LK http://dx.doi.org/https://doi.org/10.1109/MEMSTECH.2019.8817394 DO https://doi.org/10.1109/MEMSTECH.2019.8817394 SF ELIB - SuUB Bremen
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