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1 Ergebnisse
1
Wafer-scale grating mapping system for rapid pitch and diff..:
, In:
2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)
,
Wu, Zon-Ru
;
Kao, Tzu-Chieh
;
Kao, Chia-Wei
... - p. 1-3 , 2019
Link:
https://doi.org/10.23919/PS.2019.8817627
RT T1 <cTitle>2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)</cTitle>: T1 <Title>Wafer-scale grating mapping system for rapid pitch and diffraction efficiency measurement</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8817627&Exemplar=1&LAN=DE A1 Wu, Zon-Ru A1 Kao, Tzu-Chieh A1 Kao, Chia-Wei A1 Chang, Ping-Chien A1 Lin, Wei A1 Hung, Yung-Jr YR 2019 K1 Gratings K1 Measurement by laser beam K1 Diffraction K1 Diffraction gratings K1 Laser beams K1 Lithography K1 Distributed feedback devices K1 Semiconductor lasers K1 optical diffractometer K1 laser interference lithography SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.23919/PS.2019.8817627 DO https://doi.org/10.23919/PS.2019.8817627 SF ELIB - SuUB Bremen
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