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3D Kinetic Monte Carlo Simulation of Electromigration in Mu..:

, In: 2019 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD),
Cai, Linlin ; Chen, Wangyong ; Zhang, Xing.. - p. 1-4 , 2019
Link: https://doi.org/10.1109/SISPAD.2019.8870540