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A Double-Deck Structured MEMS Electrostatic Vibrational Ene..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Honma, Hiroaki ; Toshiyoshi, Hiroshi - p. 1017-1020 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870642