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Process Development of Low Resistive Ag-Based Through Silic..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Yang, Jia-Han ; Tsou, Kun-Lin ; Fu, Yu-Min.. - p. 376-379 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870649