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Monolithic/Vertical Integration of Piezo-Resistive Tactile ..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Lee, Jia-Horng ; Yeh, Sheng-Kai ; Fang, Weileun - p. 826-829 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870664