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A Novel Thermopile-Based Gas Flow Sensor Fabricated with a ..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Xue, Dan ; Ni, Zao ; Li, Wei.. - p. 751-754 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870671