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Out-of-Plane Comb-Fingers for a Low-Noise, 0.12-MM2 Z-Axis ..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Maspero, F. ; Delachanal, S. ; Berthelot, A.... - p. 692-695 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870681