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Implementation of Two-Poly Differential MEMS Microphones fo..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Lo, Sung-Cheng ; Chan, Chun-Kai ; Lee, Ya-chu.. - p. 775-778 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870747