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Piezoelectric Micromachined Ultrasonic Transducer with a Un..:
, In:
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
,
Feng, Guo-Hua
;
Liu, Hua-Jin
;
Lai, Gui-Rong
- p. 779-782 , 2019
Link:
https://doi.org/10.1109/MEMSYS.2019.8870828
RT T1 <cTitle>2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Piezoelectric Micromachined Ultrasonic Transducer with a Universal Bottom-Up Fabrication Approach Implemented on a Foil as Doppler Radar for Gesture Recognition</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8870828&Exemplar=1&LAN=DE A1 Feng, Guo-Hua A1 Liu, Hua-Jin A1 Lai, Gui-Rong YR 2019 SN 2160-1968 K1 Titanium K1 Fabrication K1 Ultrasonic transducers K1 Substrates K1 Electrodes K1 Sensors K1 Doppler radar SP 779 OP 782 LK http://dx.doi.org/https://doi.org/10.1109/MEMSYS.2019.8870828 DO https://doi.org/10.1109/MEMSYS.2019.8870828 SF ELIB - SuUB Bremen
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