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A Temperature-Insensitive CMOS-MEMS Resonator Utilizing Ele..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Liu, Jia-Ren ; Li, Wei-Chang - p. 161-164 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870843