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A Contactless Micromachined Respiratory Sensor using Positi..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Yeh, Chao-Chi ; Xu, Ming-Xin ; Yang, Yao-Joe - p. 87-90 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870844