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Boosting Qs of AlN Resonators by Redefining Acoustic Bounda..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Gao, Anming ; Winterkorn, Martin ; Yang, Yansong... - p. 883-886 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870846