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Development of Gas Permeable Parylene HT as a Substrate for..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Scianmarello, Nicholas ; Cook, Colin ; Shang, Kuang-Ming. - p. 511-514 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870854