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1.5-Million Q-Factor Vacuum-Packaged Birdbath Resonator Gyr..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Cho, Jae Yoong ; Woo, J.-K. ; He, Guohong... - p. 210-213 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870889