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ALD Titania Sidewalls on a CMOS-MEMS Resonator Oscillator a..:

, In: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS),
Lin, Yi-Chung ; Guney, Metin G. ; Fedder, Gary K. - p. 640-643 , 2019
Link: https://doi.org/10.1109/MEMSYS.2019.8870899