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1 Ergebnisse
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Design and analysis of the mechanical structure of a linear..:
, In:
2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)
,
Lopez-Tapia, Andrea
;
Reyes-Barranca, Mario Alfredo
;
Stephany Abarca-Jimenez, Griselda
... - p. 1-6 , 2019
Link:
https://doi.org/10.1109/ICEEE.2019.8884566
RT T1
2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)
: T1
Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology
UL https://suche.suub.uni-bremen.de/peid=ieee-8884566&Exemplar=1&LAN=DE A1 Lopez-Tapia, Andrea A1 Reyes-Barranca, Mario Alfredo A1 Stephany Abarca-Jimenez, Griselda A1 Sanchez-Marquez, Luis A1 Flores-Nava, Luis Martin A1 Arellano-Cardenas, Oliverio YR 2019 SN 2642-3766 K1 CMOS technology K1 CMOS integrated circuits K1 Electrostatic actuators K1 Micromotors K1 MEMS K1 Linear Micromotor K1 Mechanical Structure K1 Electrostatic Actuation SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ICEEE.2019.8884566 DO https://doi.org/10.1109/ICEEE.2019.8884566 SF ELIB - SuUB Bremen
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