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Study of Thick Copper Metallization with WNx as Diffusion B..:

, In: 2019 14th European Microwave Integrated Circuits Conference (EuMIC),
Lin, Y. C. ; Lee, M. W. ; Tsai, M. Y.... - p. 68-71 , 2019
Link: https://doi.org/10.23919/EuMIC.2019.8909414