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1 Ergebnisse
1
Development of electrostatic precipitator and wet scrubber ..:
, In:
2019 IEEE Industry Applications Society Annual Meeting
,
Sung, Jin-Ho
;
Kim, San
;
Han, Bangwoo
... - p. 1-7 , 2019
Link:
https://doi.org/10.1109/IAS.2019.8912406
RT T1 <cTitle>2019 IEEE Industry Applications Society Annual Meeting</cTitle>: T1 <Title>Development of electrostatic precipitator and wet scrubber integration technology for controlling NOx and particulate matter emission from semiconductor manufacturing process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8912406&Exemplar=1&LAN=DE A1 Sung, Jin-Ho A1 Kim, San A1 Han, Bangwoo A1 Kim, Yong-Jin A1 Hong, Kee-Jung A1 Kim, Hak-Joon YR 2019 SN 2576-702X K1 Materials handling K1 Oxidation K1 Machinery K1 Electrostatic precipitators K1 Plasmas K1 Absorption K1 Chemicals K1 Indirect DBD plasma K1 Wet scrubber K1 Electrostatic precipitator K1 NOx K1 Particulate matter SP 1 OP 7 LK http://dx.doi.org/https://doi.org/10.1109/IAS.2019.8912406 DO https://doi.org/10.1109/IAS.2019.8912406 SF ELIB - SuUB Bremen
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