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1 Ergebnisse
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Photoluminescence of SiO2/SiNx/SiO2/Si Structures with Off-..:
, In:
2018 IEEE 8th International Conference Nanomaterials: Application & Properties (NAP)
,
Romanov, I.A.
;
Krekoten, N.A.
;
Lu, H.-L.
... - p. 1-4 , 2018
Link:
https://doi.org/10.1109/NAP.2018.8915123
RT T1 <cTitle>2018 IEEE 8th International Conference Nanomaterials: Application & Properties (NAP)</cTitle>: T1 <Title>Photoluminescence of SiO2/SiNx/SiO2/Si Structures with Off-Stoichiometric Silicon Nitride Layers</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8915123&Exemplar=1&LAN=DE A1 Romanov, I.A. A1 Krekoten, N.A. A1 Lu, H.-L. A1 Vlasukova, L.A. A1 Parkhomenko, I.N. A1 Komarov, F.F. A1 Milchanin, O.V. A1 Makhavikou, M.A. A1 Mudryi, A.V. A1 Zhivulko, V.D. A1 Kovalchuk, N.S. YR 2018 K1 Films K1 Silicon nitride K1 Annealing K1 Silicon K1 Periodic structures K1 Absorption K1 Photoluminescence K1 silicon nitride K1 photoluminescence K1 spectral ellipsometry K1 absorption edge K1 rapid thermal annealing SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/NAP.2018.8915123 DO https://doi.org/10.1109/NAP.2018.8915123 SF ELIB - SuUB Bremen
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