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Silicon Hyperdoped with Selenium by Ion Implantation Follow..:

, In: 2018 IEEE 8th International Conference Nanomaterials: Application & Properties (NAP),
Komarov, F.F. ; Nechaev, N.S. ; Vlasukova, L.A.... - p. 1-5 , 2018
Link: https://doi.org/10.1109/NAP.2018.8915262