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1 Ergebnisse
1
A High Accuracy Resonant Pressure Sensor with Lateral Drive..:
, In:
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
,
Han, Xiangguang
;
Zhao, Libo
;
Li, Xuejiao
... - p. 167-171 , 2019
Link:
https://doi.org/10.1109/NEMS.2019.8915599
RT T1
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
: T1
A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection
UL https://suche.suub.uni-bremen.de/peid=ieee-8915599&Exemplar=1&LAN=DE A1 Han, Xiangguang A1 Zhao, Libo A1 Li, Xuejiao A1 Yang, Ping A1 Wang, Hongyan A1 Jiang, Zhuangde YR 2019 SN 2474-3755 K1 Pressure sensors K1 Couplings K1 Resonant frequency K1 Piezoresistance K1 Pressure measurement K1 Vibrations K1 Silicon K1 resonant pressure sensor K1 high accuracy K1 piezoresistive detection K1 lateral driven K1 integrated comb SP 167 OP 171 LK http://dx.doi.org/https://doi.org/10.1109/NEMS.2019.8915599 DO https://doi.org/10.1109/NEMS.2019.8915599 SF ELIB - SuUB Bremen
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