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1 Ergebnisse
1
A High-sensitivity, Small-size Resonant Pressure Microsenso..:
, In:
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
,
Lu, Yulan
;
Zhang, Sen
;
Li, Yadong
... - p. 488-491 , 2019
Link:
https://doi.org/10.1109/NEMS.2019.8915640
RT T1 <cTitle>2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)</cTitle>: T1 <Title>A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8915640&Exemplar=1&LAN=DE A1 Lu, Yulan A1 Zhang, Sen A1 Li, Yadong A1 Xie, Bo A1 Chen, Deyong A1 Wang, Junbo A1 Chen, Jian YR 2019 SN 2474-3755 K1 Microsensors K1 Sensitivity K1 Resonant frequency K1 Q-factor K1 Electrodes K1 Glass K1 Resonant pressure microsensor K1 differential sensitivity K1 small size K1 double resonators K1 tuning fork SP 488 OP 491 LK http://dx.doi.org/https://doi.org/10.1109/NEMS.2019.8915640 DO https://doi.org/10.1109/NEMS.2019.8915640 SF ELIB - SuUB Bremen
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