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Effect of Shared Cavity on Electromechanical Performance of..:

, In: 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
Wang, Weili ; Chiu, Yihsiang ; Gong, Dan... - p. 482-487 , 2019
Link: https://doi.org/10.1109/NEMS.2019.8915657