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Profiling of Microcantilever Vibration Modes by Scanning As..:

, In: 2019 34th Symposium on Microelectronics Technology and Devices (SBMicro),
Alves, Gustavo Marcati A. ; Mansano, Ronaldo. D. - p. 1-4 , 2019
Link: https://doi.org/10.1109/SBMicro.2019.8919357