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1
Univiariate Signal Preprocessing Methodology for Fault Dete..:
, In:
2019 IEEE International Conference on Computational Science and Engineering (CSE) and IEEE International Conference on Embedded and Ubiquitous Computing (EUC)
,
Chang, Kyuchang
;
Baek, Jun-Geol
- p. 230-232 , 2019
Link:
https://doi.org/10.1109/CSE/EUC.2019.00051
RT T1 <cTitle>2019 IEEE International Conference on Computational Science and Engineering (CSE) and IEEE International Conference on Embedded and Ubiquitous Computing (EUC)</cTitle>: T1 <Title>Univiariate Signal Preprocessing Methodology for Fault Detection in Semiconductor Manufacturing Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8919603&Exemplar=1&LAN=DE A1 Chang, Kyuchang A1 Baek, Jun-Geol YR 2019 K1 Feature extraction K1 Time series analysis K1 Fault detection K1 Manufacturing processes K1 Bayes methods K1 Semiconductor device measurement K1 Time Series Classification(TSC) Feature Extraction Fault Detection and Classification(FDC) Clustering Hierarchical Clustering Segmentation SP 230 OP 232 LK http://dx.doi.org/https://doi.org/10.1109/CSE/EUC.2019.00051 DO https://doi.org/10.1109/CSE/EUC.2019.00051 SF ELIB - SuUB Bremen
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