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Optical MEMS based micromirror arrays: fabrication,characte..:
, In:
2019 International Conference on Optical MEMS and Nanophotonics (OMN)
,
Hillmer, Hartmut
;
Al-Qargholi, Basim
;
Khan, Muhammad Mohsin
... - p. 188-189 , 2019
Link:
https://doi.org/10.1109/OMN.2019.8925046
RT T1 <cTitle>2019 International Conference on Optical MEMS and Nanophotonics (OMN)</cTitle>: T1 <Title>Optical MEMS based micromirror arrays: fabrication,characterization and potential applications in smart active windows</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8925046&Exemplar=1&LAN=DE A1 Hillmer, Hartmut A1 Al-Qargholi, Basim A1 Khan, Muhammad Mohsin A1 Iskhandar, Mustaqim Siddi Que A1 Wilke, Hans A1 Tatzel, Andreas YR 2019 K1 Micromechanical devices K1 Nanophotonics K1 Micromirrors K1 Optical arrays K1 Smart glasses K1 Reliability K1 Smart homes K1 optical MEMS K1 micromirror arrays K1 smart glass K1 reliability K1 proof of concept K1 smart home K1 electrostatic actuation SP 188 OP 189 LK http://dx.doi.org/https://doi.org/10.1109/OMN.2019.8925046 DO https://doi.org/10.1109/OMN.2019.8925046 SF ELIB - SuUB Bremen
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