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Thermal dynamics of 2-axis electrothermal MEMS micromirrors:
, In:
2019 International Conference on Optical MEMS and Nanophotonics (OMN)
,
Donnachie, Mark
;
Uttamchandani, Deepak
;
Bauer, Ralf
- p. 228-229 , 2019
Link:
https://doi.org/10.1109/OMN.2019.8925050
RT T1 <cTitle>2019 International Conference on Optical MEMS and Nanophotonics (OMN)</cTitle>: T1 <Title>Thermal dynamics of 2-axis electrothermal MEMS micromirrors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8925050&Exemplar=1&LAN=DE A1 Donnachie, Mark A1 Uttamchandani, Deepak A1 Bauer, Ralf YR 2019 K1 Micromechanical devices K1 Actuators K1 Time factors K1 Temperature measurement K1 Micromirrors K1 Optical imaging K1 electrothermal MEMS scanner K1 thermal dynamics K1 2D micromirror SP 228 OP 229 LK http://dx.doi.org/https://doi.org/10.1109/OMN.2019.8925050 DO https://doi.org/10.1109/OMN.2019.8925050 SF ELIB - SuUB Bremen
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