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Design and Fabrication of SAW Resonators on Silicon Substra..:
, In:
2019 IEEE International Ultrasonics Symposium (IUS)
,
Santosh Gollapudi, Sai Krishna
;
Nemade, Harshal B.
- p. 695-698 , 2019
Link:
https://doi.org/10.1109/ULTSYM.2019.8925645
RT T1
2019 IEEE International Ultrasonics Symposium (IUS)
: T1
Design and Fabrication of SAW Resonators on Silicon Substrate Employing Transverse BAW in Patterned ZnO
UL https://suche.suub.uni-bremen.de/peid=ieee-8925645&Exemplar=1&LAN=DE A1 Santosh Gollapudi, Sai Krishna A1 Nemade, Harshal B. YR 2019 SN 1948-5727 K1 Zinc oxide K1 II-VI semiconductor materials K1 Surface acoustic waves K1 Substrates K1 Silicon K1 Surface impedance K1 Surface acoustic wave devices K1 resonator K1 hybrid transducer K1 SAW K1 BAW K1 thin film SP 695 OP 698 LK http://dx.doi.org/https://doi.org/10.1109/ULTSYM.2019.8925645 DO https://doi.org/10.1109/ULTSYM.2019.8925645 SF ELIB - SuUB Bremen
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