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Liquid operable AlN PMUT with high output pressure capabili..:

, In: 2019 IEEE International Ultrasonics Symposium (IUS),
Ledesma, E. ; Zamora, I. ; Tzanov, V.... - p. 251-254 , 2019
Link: https://doi.org/10.1109/ULTSYM.2019.8926234