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Electrothermal Analysis of a MetalMUMPs Device for Acetone ..:

, In: 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM),
Ahmed, A. Y. ; Khir, M. H. Md ; Dennis, J. O.. - p. 164-167 , 2019
Link: https://doi.org/10.1109/RSM46715.2019.8943549