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1 Ergebnisse
1
Effect of the Gas Chemistry, Total Pressure, and Microwave ..:
, In:
2019 7th International Engineering, Sciences and Technology Conference (IESTEC)
,
Tirado, Pablo
;
Alcantar, Jesus
;
Obaldia, Elida de
.. - p. 85-91 , 2019
Link:
https://doi.org/10.1109/IESTEC46403.2019.00024
RT T1
2019 7th International Engineering, Sciences and Technology Conference (IESTEC)
: T1
Effect of the Gas Chemistry, Total Pressure, and Microwave Power on the Grain Size and Growth Rate of Polycrystalline Diamond Films Grown by Microwave Plasma Chemical Vapor Deposition Technique
UL https://suche.suub.uni-bremen.de/peid=ieee-8943694&Exemplar=1&LAN=DE A1 Tirado, Pablo A1 Alcantar, Jesus A1 Obaldia, Elida de A1 Garcia, Rafael A1 Auciello, Orlando YR 2019 K1 Films K1 Diamond K1 Grain size K1 Gases K1 X-ray scattering K1 Microwave theory and techniques K1 polycrystalline diamond films K1 MPCVD K1 carbon materials K1 material chemistry SP 85 OP 91 LK http://dx.doi.org/https://doi.org/10.1109/IESTEC46403.2019.00024 DO https://doi.org/10.1109/IESTEC46403.2019.00024 SF ELIB - SuUB Bremen
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