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1 Ergebnisse
1
Effect of Nitrogen Flow on the Growth of Nitrogen Ultranano..:
, In:
2019 7th International Engineering, Sciences and Technology Conference (IESTEC)
,
Villarreal, Daniel
;
Wittel, Frederick P.
;
Rajan, Anusha
... - p. 78-84 , 2019
Link:
https://doi.org/10.1109/IESTEC46403.2019.00023
RT T1 <cTitle>2019 7th International Engineering, Sciences and Technology Conference (IESTEC)</cTitle>: T1 <Title>Effect of Nitrogen Flow on the Growth of Nitrogen Ultrananocrystalline Diamond (N-UNCD) Films on Si/SiO2/HfO2 Substrate</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8943732&Exemplar=1&LAN=DE A1 Villarreal, Daniel A1 Wittel, Frederick P. A1 Rajan, Anusha A1 Wittel, Phillip A1 Alcantar-Pena, Jesus A1 Auciello, Orlando A1 Obaldia, Elida de YR 2019 K1 Films K1 Hafnium compounds K1 Substrates K1 Diamond K1 Atomic layer deposition K1 Surface morphology K1 N UNCD K1 HfO2 K1 films K1 Hafnium Carbide K1 Hafnium Nitride K1 Hot Filament CVD SP 78 OP 84 LK http://dx.doi.org/https://doi.org/10.1109/IESTEC46403.2019.00023 DO https://doi.org/10.1109/IESTEC46403.2019.00023 SF ELIB - SuUB Bremen
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