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Investigation of ScAlN for piezoelectric and ferroelectric ..:
, In:
2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC)
,
Petrich, R.
;
Strehle, S.
;
Hoffmann, M.
... - p. 1-5 , 2019
Link:
https://doi.org/10.23919/EMPC44848.2019.8951824
RT T1 <cTitle>2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC)</cTitle>: T1 <Title>Investigation of ScAlN for piezoelectric and ferroelectric applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-8951824&Exemplar=1&LAN=DE A1 Petrich, R. A1 Strehle, S. A1 Hoffmann, M. A1 Muller, J. A1 Bartsch, H. A1 Tonisch, K. A1 Jaekel, K. A1 Barth, S. A1 Bartzsch, H. A1 Glos, D. A1 Delan, A. A1 Krischok, S. YR 2019 K1 Scandium aluminum nitride K1 piezoelectricity K1 ferroelectricity K1 magnetron sputtering SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.23919/EMPC44848.2019.8951824 DO https://doi.org/10.23919/EMPC44848.2019.8951824 SF ELIB - SuUB Bremen
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