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1 Ergebnisse
1
Glass Wafer Level Packaging Enabled by Laser Induced Deep E..:
, In:
2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC)
,
Delrue, Jean-Pol
;
Ostholt, Roman
;
Ambrosius, Norbert
- p. 1-5 , 2019
Link:
https://doi.org/10.23919/EMPC44848.2019.8951876
RT T1
2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC)
: T1
Glass Wafer Level Packaging Enabled by Laser Induced Deep Etching of Closed Cavities
UL https://suche.suub.uni-bremen.de/peid=ieee-8951876&Exemplar=1&LAN=DE A1 Delrue, Jean-Pol A1 Ostholt, Roman A1 Ambrosius, Norbert YR 2019 K1 wafer Level Packaging K1 closed pockets for glass capping wafers K1 Laser induced deep etching SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.23919/EMPC44848.2019.8951876 DO https://doi.org/10.23919/EMPC44848.2019.8951876 SF ELIB - SuUB Bremen
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