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1 Ergebnisse
1
Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon..:
, In:
2019 IEEE SENSORS
,
Tong, Xiaoshan
;
Zhao, Yulong
;
Ma, Xin
... - p. 1-4 , 2019
Link:
https://doi.org/10.1109/SENSORS43011.2019.8956612
RT T1
2019 IEEE SENSORS
: T1
Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components
UL https://suche.suub.uni-bremen.de/peid=ieee-8956612&Exemplar=1&LAN=DE A1 Tong, Xiaoshan A1 Zhao, Yulong A1 Ma, Xin A1 Guo, Peng A1 Zhang, Qi A1 Liu, Mingjie A1 Zhang, Dongliang A1 Wang, Aiying YR 2019 SN 2168-9229 K1 amorphous carbon film K1 ultra-thin sensitive structure K1 pressure sensors K1 piezoresistive effect K1 wet-etching SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/SENSORS43011.2019.8956612 DO https://doi.org/10.1109/SENSORS43011.2019.8956612 SF ELIB - SuUB Bremen
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