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An Improved Analysis Method on Si-Photonics Waveguide Sidew..:
, In:
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
,
TAN, Hao
;
ZHU, Xintong
;
ANG, Poh Chuan
... - p. 1-4 , 2019
Link:
https://doi.org/10.1109/IPFA47161.2019.8984810
RT T1
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
An Improved Analysis Method on Si-Photonics Waveguide Sidewall Roughness
UL https://suche.suub.uni-bremen.de/peid=ieee-8984810&Exemplar=1&LAN=DE A1 TAN, Hao A1 ZHU, Xintong A1 ANG, Poh Chuan A1 ZHAO, Yuzhe A1 MENON, Krishnanunni A1 PAN, Yanlin A1 CHEN, Changqing A1 TAN, Pik Kee YR 2019 SN 1946-1550 K1 Si-photonics K1 Waveguide K1 Sidewall roughness K1 AFM SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA47161.2019.8984810 DO https://doi.org/10.1109/IPFA47161.2019.8984810 SF ELIB - SuUB Bremen
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