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Poly-Si Unetch Failure Due to Etching Rate Dependence of Si..:

, In: 2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA),
Nam, Dahyun ; Ryu, Hyunjun ; Chung, Shinyoung... - p. 1-3 , 2019
Link: https://doi.org/10.1109/IPFA47161.2019.8984839