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1 Ergebnisse
1
Metallic Trace Contaminant Detection Using SEM/EDX:
, In:
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Lee, Aaron
;
Zee, Bernice
;
Foo, Fang Jie
- p. 1-4 , 2019
Link:
https://doi.org/10.1109/IPFA47161.2019.8984856
RT T1
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
Metallic Trace Contaminant Detection Using SEM/EDX
UL https://suche.suub.uni-bremen.de/peid=ieee-8984856&Exemplar=1&LAN=DE A1 Lee, Aaron A1 Zee, Bernice A1 Foo, Fang Jie YR 2019 SN 1946-1550 SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA47161.2019.8984856 DO https://doi.org/10.1109/IPFA47161.2019.8984856 SF ELIB - SuUB Bremen
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