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In-depth Analysis of 10 nm Exynos Processor using Micro CT ..:
, In:
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
,
Sharang, S
;
Dluhos, Jiri
;
Kalasova, Dominika
... - p. 1-4 , 2019
Link:
https://doi.org/10.1109/IPFA47161.2019.8984907
RT T1
2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA)
: T1
In-depth Analysis of 10 nm Exynos Processor using Micro CT and FIB-SEM System
UL https://suche.suub.uni-bremen.de/peid=ieee-8984907&Exemplar=1&LAN=DE A1 Sharang, S A1 Dluhos, Jiri A1 Kalasova, Dominika A1 Denisyuk, Andrey A1 Vana, Rostislav A1 Zikmund, Tomas A1 Kaiser, Jozef A1 Obona, Jozef Vincenc YR 2019 SN 1946-1550 K1 Delayering K1 Micro CT K1 TEM K1 FIB-SEM K1 Nanoprobing SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IPFA47161.2019.8984907 DO https://doi.org/10.1109/IPFA47161.2019.8984907 SF ELIB - SuUB Bremen
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